High density, low leakage back-end 3D capacitors for mixed signals applications
- Detalle, M.
- Barrenetxea, M.
- Muller, P.
- Potoms, G.
- Phommahaxay, A.
- Soussan, P.
- Vaesen, K.
- De Raedt, W.
ISSN: 0167-9317
Year of publication: 2010
Volume: 87
Issue: 12
Pages: 2571-2576
Type: Article