Development of a high-resolution positioner for 3D nanometrology of microparts
- Gómez-Acedo, E.
- Eguia, J.
- Calvo, R.
- Rekakoetxea, X.
Proceedings:
Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011
ISBN: 9780955308291
Year of publication: 2011
Volume: 1
Pages: 100-103
Type: Conference paper